UVOC ultraviolet / ozone cleaner

Product Details

UVOC / T10X10 OES

Manufacturer: UVOC
Classification: Miscellaneous
Equipment: UV/ ozone cleaner
Use: Ultraviolet / ozone removal of organic substances
Room temperature process
Fast - less than 20 minutes for many applications
Easy Processing
Modest initial price and minimal operating cost
Long term operational reliability


General Information

UVOCS ultraviolet / ozone cleaner is used for cleaning of wafers contaminated with organic substances. UV/Ozone Cleaning Removes Traces of; residual PhotoResist, silicone oil and grease, skin oil, condensed adhesive volatiles, and carbon traces. The cleaner contains a low pressure, quartz, mercury vapor lamp that generates 185-nm and 254-nm UV light. Atmospheric oxygen absorbs the 185-nm UV light, dissociates to atomic oxygen, and forms ozone. The organic contaminants are excited and/or dissociated by the 254-nm UV light. After excitation they easily react with ozone to form non-condensing, volatile compounds, such as CO2 and H2O vapor. The process takes place at essentially room temperature in one to several minutes.
The best cleaning results are obtained by placing the parts to be cleaned as close as possible to the UV light source. Upon prolonged cleaning, a temperature rise is possible. If the cleaner is in continuous use, temperatures up to 70